COPRA Linear Sources

OverviewLS358x156-GRLS500x500-DPRLS670x202-GRPELS700x251-DPRLS950x201-GRPELS1100x201-GRPELS-customizable

The COPRA LS1100x201 is designed for PVD-Assist and DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 1000 mm. The COPRA LS1100x201 solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS1100x201 are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

COPRA LS1100x201
1100x201 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
-
1000 mm
CCR Flange
13,56 MHz
6 or 8 kW
-
3x10-4 to 1x10-2 mbar
7/16 or LC
Profibus/Serial
2x flex tube 8 mm
>3L/min
Swagelok 6 mm
AL
115 kg