COPRA Products

COPRA Product Family COPRA Round Sources

Overview DN 160-CF-GM DN200-CF-GM DN200-X-GM DN250-CF-GM DN250-ISO-F-EGIM DN401-GRPE DN501-GRPE DN-customizable

COPRA Linear Sources

Overview LS358x156-GR LS500x500-DPR LS670x202-GRPE LS700x251-DPR LS950x201-GRPE LS1100x201-GRPE LS-customizable

COPRA Ring Sources

Overview RS1000x300-DPR RS1000x400-DPR RS1150x300-DPR RS700x600-DPR RS850x850-DPR RS400-DPR RS500x500-DPR RS-customizable

COPRA Built In Sources

Overview IS200-GR IS200-EGR IS301-EGIRPE IS400-EGIRPE IS501-EGIRPE IS-customizable

Applications

Aplication Overview

PECVD

PVD Assist

PVD-Assist Sputter Assist Evaporation Coater Assist

Etching

Reactive Etching Physical Etching

Cleaning & Activation PALD-Assist

Copra´s Basics R&D News/Events Contact Jobs/Career Partners

QM

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COPRA Product Family

Germany

CCR GmbH
Camp-Spich-Str. 3a
D-53842 Troisdorf

T: +49(0)2241-93215-0
F: +49(0)2241-93215-200

contact(at)ccrtechnology.de
www.ccrtechnology.de

Products

COPRA Round Sources
COPRA Linear Sources
COPRA Ring Sources
COPRA Built In Sources
Faraday Cup

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