COPRA Products
COPRA Product Family
COPRA Round Sources
Overview
DN 160-CF-GM
DN200-CF-GM
DN200-X-GM
DN250-CF-GM
DN250-ISO-F-EGIM
DN401-GRPE
DN501-GRPE
DN-customizable
COPRA Linear Sources
Overview
LS358x156-GR
LS500x500-DPR
LS670x202-GRPE
LS700x251-DPR
LS950x201-GRPE
LS1100x201-GRPE
LS-customizable
COPRA Ring Sources
Overview
RS1000x300-DPR
RS1000x400-DPR
RS1150x300-DPR
RS700x600-DPR
RS850x850-DPR
RS400-DPR
RS500x500-DPR
RS-customizable
COPRA Built In Sources
Overview
IS200-GR
IS200-EGR
IS301-EGIRPE
IS400-EGIRPE
IS501-EGIRPE
IS-customizable
Faraday Cup
Applications
Aplication Overview
PECVD
PECVD
PVD Assist
PVD-Assist
Sputter Assist
Evaporation Coater Assist
Etching
Reactive Etching
Physical Etching
Cleaning & Activation
PALD-Assist
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